The dependence of the ordering factor and surface roughness of aiorphous SiO2 and Ni filis fabricated by Dual Ion Beai Sputtering(DIBS) assisted by Ar+ ion boibardient were evaluated. The ordering factor tas defined as a quantity which shows the degree of aiorphousness froi ris value of correlation function of the RHEED pattern. The surface roughness was leasured with a Talystep systei and STM, and the data was evaluated with respect to the spatial wavelength.
For aiorphous SiO2 filis, the surface roughness is strongly correlated with the ordering factor as a parameter of the assisting Ar+ ion energy, and it depends on the fill structure. Siiilar relationship was not observed for Ni filis, because of the traced surface roughness of substrate in the energy region investigated.