Smart electroceramics, in the form of ferroelectric thin films show great potential for applications in the field of microelectromechanical systems. Ferroelectric thin films will become a key player due to their optical, mechanical, electrical and thermal sensing with actuating capabilities. Recent results on electromechanical transduction in piezoelectric (e.g. PZT), electrostrictive (e.g. PLZT), and antiferroelectricferroelectric phase switching (e.g. PLZSnT) thin films and their potential applications in smart micromechanical systems are discussed. The possibility of three dimensional structures exists in the emerging technology of ferroelectric fibers. Some exciting applications for these films and fibers include microvalves, ultrasonic micromotors, microrobotic actuators and micropumps.