The formation frequency of habit plane variant (HPV) clusters in Ni-25Pd-50Ti shape memory alloy was analyzed using electron backscattering diffraction (EBSD) on the basis of the geometrically nonlinear theory of martensite. Two types of cluster, diamond and wedge, were most commonly observed. The ratio of the formation frequency of the diamond to wedge clusters was approximately 1 : 3, whereas the rotation to keep the kinematic compatibility (KC) condition, θ *, was 3.9° and 0.0032°, respectively. The ratio of the formation frequency is quantified by the value of θ * which is an indicator of the incompatibility of the cluster. The origin of the diamond cluster is discussed based on the degree of incompatibility.