Fe0.1Sc0.9N with a thickness of ˜ 380 nm was grown on top of a ScN(001) buffer layer of ˜ 50 nm, grown on MgO(001) substrate by radio-frequency N-plasma molecular beam epitaxy (rf-MBE). The buffer layer was grown at TS ˜ 800 oC, whereas the Fe0.1Sc0.9N film was grown at TS ˜ 420 oC. In-situ reflection high-energy electron diffraction measurements show that the Fe0.1Sc0.9N film growth starts with a combination of spotty and streaky pattern [indicative of a combination of smooth and rough surface]. After ˜ 10 minutes of growth, the pattern converts to a spotty one [indicative of a rough surface]. Towards the end of the Fe0.1Sc0.9N film growth, the spotty patterns transform into even spottier, but also ring-like indicating a polycrystalline behavior. Superconducting quantum interference device magnetic measurements show a ferromagnetic to paramagnetic transition of TC ˜ 370 – 380 K. We calculated a magnetic moment per atom of μ(Fe0.1Sc0.9N) = 0.037 Bohr magneton/ Mn-atom. Based on the carrier concentration measurements (nS
(Fe0.1Sc0.9N) = 2.086 × 1019 /cm3), we find that iron behaves as an acceptor. Comparisons are made with similar MnScN (001)/ScN(001)/MgO(001) system.