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Thin films of pyroelectric PZT deposited by Jet Vapor Deposition are considered here for application in IR detector arrays. PZT films of 0.5 μm thickness were deposited on platinum coated insulating substrates and then annealed to increase the perovskite grain size. Capacitor test structures were used to measure the dielectric constant, loss, AC resistivity, and pyroelectric coefficient. We compare the results with known values for bulk PZT and discuss their relevance to detector design and performance.
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