Aerogels are highly porous solids having unique morphology among materials because both the pores and particles making up the material have sizes less than wavelengths of visible light. Such a unique morphology modifies the normal molecular transport mechanisms within the material, resulting in exceptional thermal, acoustical, mechanical, and electrical properties. For example, aerogels have the lowest measured thermal conductivity and dielectric constant for any solid material. Special methods are required to make aerogel films with high porosity. In this paper, we discuss the special conditions needed to fabricate aerogel films having porosities greater than 75% and we describe methods of processing inorganic aerogel films having controllable thicknesses in the range 0.5 to 200 micrometers. We report methods and results of characterizing the films including thickness, refractive index, density (porosity), and dielectric constant. We also discuss results of metallization and patterning on the aerogel films for applications involving microminiature electronics and thermal detectors.