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Zinc oxide thin films prepared by sol-gel and doped with different aluminum percentages were deposited by spray-pyrolysis deposition techniques on FTO and ITO substrates. The films were applied as the sensitive layer of pH-sensors EGFET devices. ZnO:Al films on FTO substrates shows a decrease in sensor quality with the dopant percentage increase. The opposite occurs when the substrate was ITO. The best quality film to be used as pH-sensor on FTO substrates was the ZnO:Al (3%) with 29 mV/pH sensitivity value and linear adjust of 0.99. For ITO substrates the best quality was achieved for ZnO:Al (10%), with sensitivity about 30 mV/pH and 0.99 linear adjust.
Oxide thin films of zinc and titanium materials were deposited by different deposition techniques, to be applied as sensitive layers of pH sensor – EGFET device. The deposition techniques tested were dip-coat, spin-coat, electrodeposition and spray-pyrolysis. The routine and the parameters of each technique were changed aiming optimized the procedures. The pHs buffer solutions tested ranged from 2 to 12. ZnO thin film shows sensitivity about 23 mV/pH, while TiO2 thin films shows only 13.8 mV/pH. The final purpose of this study is to optimize the parameters for each deposition technique for both oxide materials.
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