(NiFe/Cu/Co/Cu) Multilayers grown on (100) Si by RF sputtering have been studied by transmission electron Microscopy. The samples are found to be polycristalline and are only weakly textured. The period of the multilayers is clearly visible by small angle electron diffraction and Fresnel imaging. The waviness of the layers appears to be related to the columnar structure of the samples. Experimental images with Fresnel contrast are compared with simulations in order to assess the thickness and roughness of each individual layer.