Unhydrogenated amorphous carbon films were deposited by KrF pulsed laser ablation of graphite under a laser power density of 8×108 W/cm2. The films were characterized using x-ray reflectivity, optical transmittance, spectroscopic ellipsometry and Raman spectroscopy. The physical, optical and bonding properties of the films have been investigated in detail as functions of substrate temperatures Ts
(22-300°C) and post-annealing temperatures. Films deposited at Ts
, <200°C possessed diamond-like properties with mass densities p=2.8-3.1 g/cm3 and optical bandgaps Eg,=1.5-2.2 eV. Above Ts,=200°C, the films showed typical graphite characteristics. The diamond-like films annealed at temperatures up to 750°C show excellent thermal stability.