2 results
Measurements of Ultra-Shallow Junction (USJ) Sheet Resistance with a Non-Penetrating Four Point Probe
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C11.6
- Print publication:
- 2004
-
- Article
- Export citation
Energetic Ion Beams in Semiconductor Processing: Summary of a Doe Panel Study
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 859
- Print publication:
- 1995
-
- Article
- Export citation