The influence of the evaporation rate profiles on the microstructure of co-evaporated Cu(In,Ga)Se2, (CIGS), is discussed. The influence of Cu excess in the beginning of the CIGS growth has been investigated. In addition, the Ga rate has been varied in order to create bandgap grading in the CIGS film. By studying CIS and CGS films separately and as CGS/CIS stacks results on interdiffusion of In and Ga interdiffusion have been obtained. The resulting thin films are investigated mainly using Scanning Electron Microscopy (SEM) and X-ray Diffraction (XRD). Solar cell devices were prepared and IV measurements performed on samples with varying CIGS deposition parameters.