The electron beam broadening in specimens is a important issue to obtain a high spatial resolution expected by using a fine electron probe of nanometer order in analytical electron microscopy. Beam broadening mainly depends on electron diffusion in specimens. The theoretical equation on the beam broadening, which is based on single scattering approximation model for incident electrons, has been proposed by Goldstein et al.. in this work, the beam broadening was estimated experimentally by a TEM equipped with a field emission gun and the results were compared with the values theoretically obtained.
The sizes of the beam diameter with and without specimens were measured by using JEM-2010F and JEM 3000F TEMs, which are equipped with a field emission gun, being operated at 200 and 300 kV, respectively. The beam diameter was defined as the diameter containing 90% of the total electrons. The specimens used were amorphous SiO2, crystalline MgO and Si.