Lattice parameters and crystal orientation for Fe1 6.N2 were determined by an X-ray diffraction method using a three axes goniometer. The lattice parameters of the a-axis and c-axis(a0, c0.) are 5.71 !A and 6.33 !A, respectively. The co corresponds to that of In0, 2,Gao.,s As substrates. Crystal orientation between Fe1 5.N2. films and Ino.,2Gao.,8 As is Fe1 0N2(001)//In0 2.Ga0.2 As(1001) and Fe1 0.N2.(100)//In02Ga0.6As(100). Intensity ratios for these diffraction peaks are in good agreement with calculated values proposed by Jack.