Hafnium oxide (HfO2) and silicon containing hafnium oxide (HfSixOy) thin films were deposited by thermal and plasma enhanced chemical vapor deposition (PECVD) using Hf (IV) t-butoxide and either O2, N2O, H2O, O2 plasma or N2O plasma as an oxygen source. Silane, 2% in He, was added to the reactant gas mixture to incorporate Si. Deposition rate and composition dependence on substrate temperature was studied and the deposited films were annealed in air for 30 min at 1100°C to observe changes in crystallinity and composition. Silicon incorporation was higher for H2O deposited HfSixOy films (5 at.%) than O2 and N2O deposited films (2 at.%) and had a lower deposition rate. Arrhenius plots reveal a non-simplistic reaction scheme since higher temperatures result in lower deposition rates due to precursor desorption. XRD indicate that as-deposited films using H2O are amorphous while O2 and N2O deposited films are microcrystalline with a monoclinic phase.