1 results
Advanced Properties of Silicon Oxynitride (SiOxNy) Thin Films Prepared by Pulsed Laser Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 388 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 115
- Print publication:
- 1995
-
- Article
- Export citation