Kinetic electron emission from MgO film under the impact of 50–300 eV
rare-gas ions has been investigated by Monte Carlo simulation. The program
includes excitation of the target electrons (by projectile ions, recoiling
target atoms and fast primary electrons), subsequent transport and escape of
these electrons from the target surface. Potential electron yields due to
Auger neutralization of various ions are obtained by comparing the
calculated kinetic electron yield with the experimental data. The program
generates partial yields of the secondary electrons excited by projectile
ions, recoiling target atoms and electron cascades. The partial yields of
the electrons excited by projectile ions and electron cascades fluctuate
with mass of the projectile ion like the electronic stopping. Moreover,
lateral and depth distribution of the electrons excited by three excitation
processes were quite different. For the range of investigated ion energies,
the average electron escape depth was independent of the mass of the
incident ion, which indicates that electron escape depth is a material
property.