This paper presents several examples of defect analyses carried out in actual VLSI failure analyses and experiments, using TEM technique, process simulation and other advanced analytical tools. New TEM techniques are also described to observe a precise location which has failed.

The defect annihilation in CZ-crystal was first detected during the process of oxygen out-diffusion, by the positron measurements with a variable-energy beam. The defects, which were related to oxygen atoms such as oxygen cluster, were mainly annihilated at the high temperature, ex., 1150°C. The defect concentration was decreasing down to one tenth, compared with that for an as-grown crystal.

The phase characteristics of transmitted optical pulses in three-dimensional photonic crystals were investigated in the frequency and time domain by using the spectrally resolved cross-correlation technique. The temporal evolution of femtosecond pulses passing through polystyrene colloidal crystals exhibits a large phase distortion near the stop bands. The phase discontinuity around the band gap was observed in the frequency-domain. The phase of the transmitted pulses is found to change by p across the band gap. The dispersion curve estimated from the phase shift shows good correspondence with those calculated from a photonic band calculation. The group velocity significantly slows down near the stop bands. A large change of the group velocity dispersion is also observed near the band edges. These results are in good agreement with the band theory.

The phase characteristics of transmitted optical pulses in three-dimensional photonic crystals were investigated in the frequency and time domain by using the spectrally resolved cross-correlation technique. The temporal evolution of femtosecond pulses passing through polystyrene colloidal crystals exhibits a large phase distortion near the stop bands. The phase discontinuity around the band gap was observed in the frequency-domain. The phase of the transmitted pulses is found to change by π across the band gap. The dispersion curve estimated from the phase shift shows good correspondence with those calculated from a photonic band calculation. The group velocity significantly slows down near the stop bands. A large change of the group velocity dispersion is also observed near the band edges. These results are in good agreement with the band theory.

The phase characteristics of transmitted optical pulses in three-dimensional photonic crystals were investigated in the frequency and time domain by using the spectrally resolved cross-correlation technique. The temporal evolution of femtosecond pulses passing through polystyrene colloidal crystals exhibits a large phase distortion near the stop bands. The phase discontinuity around the band gap was observed in the frequency-domain. The phase of the transmitted pulses is found to change by φ across the band gap. The dispersion curve estimated from the phase shift shows good correspondence with those calculated from a photonic band calculation. The group velocity significantly slows down near the stop bands. A large change of the group velocity dispersion is also observed near the band edges. These results are in good agreement with the band theory.