9 results
Low Temperature Zinc Indium Oxide Backplane Development for Flexible OLED Displays in a Manufacturing Pilot Line Environment
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1287 / 2011
- Published online by Cambridge University Press:
- 15 July 2011, mrsf10-1287-f09-02
- Print publication:
- 2011
-
- Article
- Export citation
Principal Pilot Line Manufacturing Challenges and Solutions in Direct Fabrication of a-Si:H TFT Arrays on Flexible Substrates
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1030 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1030-G07-05
- Print publication:
- 2007
-
- Article
- Export citation
Wave Polymerization During Vapor Deposition of Porous Parylene-N Dielectric Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 23
- Print publication:
- 1999
-
- Article
- Export citation
The Impact of Gas Phase and Surface Chemical Reactions on Step Coverage in Lpcvd
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 471
- Print publication:
- 1993
-
- Article
- Export citation
Oxygen Atom Induced Deposition of Silicon Dioxide
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 537
- Print publication:
- 1992
-
- Article
- Export citation
Deposition of Tungsten Silicide Barrier Layers and Tungsten in Rectangular Vias
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 517
- Print publication:
- 1990
-
- Article
- Export citation
Mechanism of Plasma-Enhanced Deposition of Silicon Dioxide from Teos/O2 Mixtures
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 495
- Print publication:
- 1990
-
- Article
- Export citation
Modified Line-of-Sight Model for Deposition of Tungsten Silicide Barrier Layers
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 603
- Print publication:
- 1990
-
- Article
- Export citation
Implications of Rapid Thermal Processing for Step Coverage in Low Pressure Chemical Vapor Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 173
- Print publication:
- 1989
-
- Article
- Export citation