A systematic study of superconducting Te, Hc and also the behavior of resistivity of Nb/Si mfltiiayers is reported. Nb and Si layers with different thicknesses were deposited alternatively in an LUIV two electron—beam evaporating installation and controlled automatically by a microcomputerquartz—monitor system. Well reproduciole results were achieved. Structural analyses show very good modulated structure with (110)textured polycrystallino Nb and] amorphous Si layers. Superconducting Tc of Nb/Simultilayers are significantly higher than that of the sputtered Nb/Ge system. Thevariation of Hc(T) in parallel field manifests a 2D–3D crossover with transformation temperature of 0.7– 0.8 Tc. The possible mechanism and implication of these phenomena were discussed.