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Materials and electrical evaluation were performed to determine the characteristics of ohmic contacts to 6H-SiC. Both elemental metal (Co) and suicides (CoSi and CoSi2) were studied following heat treatments at 500 °C and 900 °C for 5 hours and 2 hours, respectively. Materials analysis by Rutherford Backscattering Spectrometry (RBS) and X-ray Diffraction (XRD) monitored the temperature stability of the contacts after the annealings. Current density-voltage measurements at elevated temperatures established the specific contact resistance pc.
A variety of low dielectric constant composites have been made into films and characterized. These composites were blends of liquid crystalline polymers (LCPs), hollow glass spheres (HGS) and polytetrafluoroethylene (PTFE). By adjusting the percentage compositions of the various components of the composites, the dielectric constant could be adjusted in the range 2.4 to 3.4. Measurement of the dielectric constant by Time Domain Reflectometry (TDR) and Frequency Domain Reflectometry (FDR) are discussed. Dielectric anisotropy is also discussed. The experimentally observed results are compared with those derived theoretically.
The parametric excitation of surface waves in a warm inhomogeneous plasma is investigated. It is demonstrated that the coupling between the surface wave and plasmons that can be excited in the transition layer must be taken into account. The growth rate and the threshold value for the instability process are calculated. It is also shown that thermal effects are of importance even for very low temperatures, since the plasmons can now propagate out of the resonance region.