15 results
Compositional and Structural Analysis of Al-doped ZnO Multilayers by LEAP
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- Journal:
- Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
- Published online by Cambridge University Press:
- 27 August 2014, pp. 526-527
- Print publication:
- August 2014
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High Throughput, Low Cost Deposition of Alumina Passivation Layers by Spatial Atomic Layer Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1323 / 2011
- Published online by Cambridge University Press:
- 28 June 2011, mrss11-1323-c04-04
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- 2011
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The Business of Fast ALD Equipment for Depositing Alumina Passivation Layers on Crystalline Silicon Solar Cells.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1353 / 2011
- Published online by Cambridge University Press:
- 17 October 2011, mrss11-1353-hh03-05
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- 2011
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Cubic phase stabilization and improved dielectric properties of atomic-layer-deposited EryHf1-yOx thin films
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- Journal:
- Journal of Materials Research / Volume 25 / Issue 8 / August 2010
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1629-1635
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- August 2010
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F+ implants in crystalline Si: the Si interstitial contribution
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E06-07
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- 2008
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Plasma-assisted Atomic Layer Deposition of TiN Films at low Deposition Temperature for High-aspect Ratio Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B6.4
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- 2005
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Dopant diffusion in amorphous silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C10.2
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- 2004
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The Role of Preamorphization and Activation for Ultra Shallow Junction Formation on Strained Si Layers Grown on SiGe Buffer
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- Journal:
- MRS Online Proceedings Library Archive / Volume 809 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, B9.6.1/C9.6
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- 2004
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High-Density, Low-loss MOS Decoupling Capacitors integrated in a GSM Power Amplifier
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- Journal:
- MRS Online Proceedings Library Archive / Volume 783 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, B6.3
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- 2003
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Control of a Metal-Electrode Work Function by Solid-State Diffusion of Nitrogen
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B5.11
- Print publication:
- 2002
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Experimental Study on the Mechanism of Carbon Diffusion in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 717 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, C5.10
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- 2002
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Ultrashallow Junction Formation and Gate Activation in Deep-Submicron CMOS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B3.1
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- 2000
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The (001) Surface of Fe3O4 Grown Epitaxially on MgO and Characterized by Scanning Tunneling Microscopy.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 474 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 191
- Print publication:
- 1997
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UV Photoannealing and RTP of Thin Sol-Gel Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 193
- Print publication:
- 1996
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Giant Magnetoresistance and Structural Study of Permalloy/Silver Multilayers During Rapid Thermal Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 77
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- 1994
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