Epitaxial Fe-Te-Se thin films were deposited by pulsed laser deposition at 250 ~ 600 °C on SrTiO3 (100, STO), MgO (100), LaAlO3 (100, LAO) and CaF2 (100) single crystal substrates. Best superconducting film was grown on CaF2: T
onset = 20.0 K and T
0 = 16.18 K with T
dep = 300 °C, 45000 pulses, 3 Hz. The critical current density J
c at 4.2 K was 0.41×106A/cm2 at 0 T and 0.23×106 A/cm2 at 9 T. Angular dependence of J
c showed broad c-axis correlated peak when B ≥ 3 T.