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1 results

Optically-Induced, Room-Temperature Oxidation of Gallium Arsenide
Chien-Fan Yu, Michael T. Schmidt, Dragan V. Podlesnik, Richard M. Osgood
Journal: MRS Online Proceedings Library Archive / Volume 75 / 1986
Published online by Cambridge University Press: 28 February 2011, 251
Print publication: 1986
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Room-temperature, optically-induced oxidation of the gallium arsenide surface has been studied with laser radiation of different wavelengths. It was found that deep-ultraviolet light is much more effective in enhancing oxidation than near-ultraviolet or visible light. The growth rate of the oxide was also found to be drastically increased by the presence of chemisorbed water molecules on the surface.