Titania nanotubes were prepared by anodic oxidation of Ti. The titania surfaces were partially coated with Zn by reacting zinc acetate with the nanotubes and then annealed.  An annealed nanotube cluster was placed carefully on a silicon wafer using tweezers. Secondary electron images were acquired by bombarding with Cs+ and observing the ejected OZn- and OTi- respectively. The SIMS analysis was done in ultra-high vacuum (∼ 10-10 Torr). The location of before and after the SIMS analysis was confirmed by scanning electron microscopy (SEM). Specific areas with various orientations (vertical and horizontal orientations) of the nanotubes were selected for the NanoSIMS 50L analysis. The NanoSIMS 50L is made by Ametek Cameca, Gennevillieres, France and is capable of doing in situ isotopic analysis of surfaces at high spatial resolution (25 nm2). The average ZnO/TiO was ∼1.8%, confirming the actual content of Zn used during synthesis of the nanotubes. Qualitatively, the TiO/ZnO ratio increased with increasing depth implying that ZnO concentration was decreasing as we probed into the nanotubes.