Ferroelectric superlattices have been actively and intensively studied in recent years for their great scientific and technological interest. Superlattice containing Pb-based ferroelectric layers are important among ferroelectric superlattice systems, however, it is difficult to grow such superlattice due to the high volatility of Pb. Recently, great progress has been made in fabricating superlattice structure of PbZrO3/PbTiO3 by multi-ion-beam sputtering’ and molecular beam epitaxy (MBE). In this paper, we report the microstructural investigations of PbTiO3/SrTiO3 superlattice films, which were epitaxially grown on the SrTi03 substrate by MBE, using transmission electron microscopy (TEM).
[(PbTiO3)l0/(SrTiO3)l0]15 superlattice films were stacked on (100) SrTiO3 substrate alternately by MBE. Before growing the superlattice structure, a baffle layer including the 1000Å La-doped SrTi03 and the subsequent 500 Å PbTiO3 thin films was grown on the substrate. Above the PbTi03/SrTi03 superlattices, another PbTi03 thin film (1000 Å) was grown. Cross-section TEM specimens were prepared by standard methods.