7 results
Fabrication Processes and Characteristics of Microelectromechanical System Using PZT Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 444 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 143
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- 1996
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Charge Trapping and Degradation Properties of PZT Thin Films for MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 444 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 161
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- 1996
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Characterization of Sol-Gel Derived (Pb,Ba)(Zr,Ti,Nb)O3 Thin Films for Optical Waveguide Development
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- Journal:
- MRS Online Proceedings Library Archive / Volume 343 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 445
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- 1994
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Characterization of Mems Actuators Via Nanoindentation
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- MRS Online Proceedings Library Archive / Volume 323 / 1993
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- 15 February 2011, 419
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- 1993
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Ferroelectric Thin Films for Microelectromechanical Device Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 276 / 1992
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- 15 February 2011, 3
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- 1992
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Applications of PZT and Related Thin Films in Piezoelectric Microsensors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 243 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 55
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- 1991
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Pyroelectric Microsensors by Sol-Gel Derived PbTiO3 and La-PbTiO3 Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 243 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 61
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- 1991
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