2 results
Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1066 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1066-A11-06
- Print publication:
- 2008
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Expedient route to volatile zirconium metal-organic chemical vapor deposition precursors using amide synthons and implementation in yttria-stabilized zirconia film growth
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- Journal:
- Journal of Materials Research / Volume 14 / Issue 1 / January 1999
- Published online by Cambridge University Press:
- 26 July 2012, pp. 12-15
- Print publication:
- January 1999
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- Article
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