A CVD reactor has been coupled to a molecular beam apparatus in order to study the gas phase decomposition of an organometallic precursor to AIN, tris-dimethylaluminum amide, [(CH3)2AINH2]3. The onset of decomposition occurs at a reactor temperature of 125°C. By 300°C, all mass spectral signals due to precursor have disappeared. With the addition of helium as a carrier gas in the CVD process, the temperature at which all precursor signals disappear is raised to 400°C. The evolution of methane accompanies the precursor decomposition. Mass spectra of the precursor and its deuterated analogue, [(CH3)2 AIND2]3, obtained between 50°C and 90°C, offer support for the existence of trimer-dimer-monomer equilibria in this temperature range.