We present the results of an investigation of the microstructural properties of layered-structure perovskite SrBi2Ta2O9 films grown by Flash-MOCVD, conventional CVD, and MOD. The films grown by Flash-MOCVD on Pt electrode layers, were polycrystalline and showed acceptable ferroelectric properties and low leakage. TEM showed that the individual crystallites were of high quality and, on average about 300nm in diameter. TEM also gave some indications of a disordered phase interspersed amongst the crystallites.
A complete, high-resolution set of XPS spectra gathered from these films confirmed that the basic perovskite structures were predominately single phased but that they were, in all cases, accompanied by a significant amount of mobil clusters of Bi metal. We speculate that this Bi metal corresponds to the disordered phase seen by TEM and show that appropriate ozone annealing is able to remove all evidence of it.