The fine ceramic particles of zirconia toughened alumina (ZTA), titania toughened alumina (TTA), and zirconia-titania toughened alumina(ZTTA) were synthesized through ultrasonic spray pyrolysis at various temperatures and compositions. The starting solution was prepared to have the concentration of 0.05 ∼ 0.1 M adjusting with water as a solvent. The temperature regulated for particle synthesis was 400 ∼ 550 °C as a drying zone, 850 ∼ 1400 °C as a pyrolysis zone. The produced particles were collected by a wet process and were analyzed to give characteristic properties after being dried. Various properties such as thermal behavior, phase, particle size and size distribution, shape, diffraction pattern, content of elements, etc, of particles synthesized with different experimental conditions were determined and studied by XRD, TG/DTA, PSA, ICP, and SEM, and the optimum experimental conditions for the particle synthesis were proposed.