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Impact of the High-Temperature Process Steps on the HfAlO Interpoly Dielectric Stacks for Nonvolatile Memory Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1071 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1071-F02-05
- Print publication:
- 2008
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- Article
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