One-dimensional photonic crystals having desired broad region of high reflectance (R) were fabricated by alternating the deposition of amorphous silicon and amorphous silicon nitride layers. The effect of the deposition temperature and angle of incidence on the optical properties of photonic crystals deposited on glass substrate was determined and an excellent matching was found with the simulated results. The broad region of high R of photonic crystals deposited on flat and textured ZnO:Al substrates decreases when compared to the R of photonic crystals de-posited on glass. The performance of amorphous silicon solar cells with 1-D photonic crystals integrated as the back reflector was evaluated. The external quantum efficiency measurement demonstrated that the solar cells with the photonic crystals back reflector had an enhanced re-sponse in the long wavelength region (above 550 nm) compared to the cells with the Ag reflector.