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We report on the successful growth of GalnP on GaAs substrate by Atomic Layer Epitaxy using organometallic and hydride sources. Growth was achieved by sequential exposure of the substrate to TMGa, PH3, TEIn and PH3. X-ray diffraction showed compositional lattice-matching optimally at 550°C with arbitrary choices of the mole fractions of the precursors in the gas phase. TEM also confirmed the highest ordering at this growth temperature on (100) substrates. Uniformity was excellent using Atomic Layer Epitaxy. Growth on (111)A GaAs substrates produced no evidence of the ordered CuPt phase present on (100) substrates.
We have studied the photoreflectance spectrum at 300K from a GaAs/In0.5 Ga0.5p (ordered) single quantum well fabricated by atomic layer epitaxy. Comparison of the energies of the observed intersubband and barrier transitions with an envelope function model calculation yields a valence band offset of 350 ± 20 meV.
We report on the low temperature growth of GaAs on Ge substrates using Atomic Layer Epitaxy. Low temperature deposition has resulted in substantial reduction of the outdiffusion of Ge into the GaAs epilayer as being indicated from SIMS. The I-V characteristics of the GaAs/Ge heterojunction were thyristor like or near abrupt depending on the growth temperature. We also report on the use of the Atomic Layer Epitaxy self-limiting adsorption process of TMGa to control the diffusion of Ga into Ge substrates at the monolayer level.
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