19 results
Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry
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- Journal:
- The European Physical Journal - Applied Physics / Volume 42 / Issue 3 / June 2008
- Published online by Cambridge University Press:
- 04 June 2008, pp. 351-359
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- June 2008
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Metrological applications of Mueller polarimetry in conical diffraction for overlay characterization in microelectronics
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- The European Physical Journal - Applied Physics / Volume 31 / Issue 1 / July 2005
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- 27 April 2005, pp. 63-69
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- July 2005
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Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactor*
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- The European Physical Journal - Applied Physics / Volume 28 / Issue 3 / December 2004
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- 23 November 2004, pp. 343-346
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- December 2004
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Deposition of optical coatings with real time control by the spectroellipsometry
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- The European Physical Journal - Applied Physics / Volume 28 / Issue 2 / November 2004
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- 03 November 2004, pp. 235-242
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- November 2004
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High density plasma enhanced chemical vapor deposition of optical thin films
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- The European Physical Journal - Applied Physics / Volume 26 / Issue 1 / April 2004
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- 04 March 2004, pp. 3-9
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- April 2004
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Role of RF Power and Gas Mixture in Some Optical and Photoluminescence Properties of Dual-Plasma a-C:H Films
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- MRS Online Proceedings Library Archive / Volume 508 / January 1998
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- 10 February 2011, 203
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- January 1998
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Analysis of Vibrational Properties of Thin Films Using in-Situ Infrared Ellipsometry: Applications to Polymerlike Amorphous Carbon Films
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- MRS Online Proceedings Library Archive / Volume 544 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 71
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- 1998
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In Situ Study of The Exposure of Polycarbonate to an Argon Plasma
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- MRS Online Proceedings Library Archive / Volume 385 / 1995
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- 15 February 2011, 27
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- 1995
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Optimization of a Dual-Mode RF / Microwave Plasma for Amorphous thin film Deposition
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- MRS Online Proceedings Library Archive / Volume 336 / 1994
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- 16 February 2011, 109
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- 1994
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The Physics of Plasma Deposition of Microcrystalline Silicon
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- MRS Online Proceedings Library Archive / Volume 283 / 1992
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- 28 February 2011, 455
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- 1992
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In Situ Investigation of Amorphous Silicon / Silicon Nitride Interfaces by Infrared Ellipsometry
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- MRS Online Proceedings Library Archive / Volume 284 / 1992
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- 22 February 2011, 425
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- 1992
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In Situ Monitoring of Interfaces and Growth of Amorphous Silicon by Spectroellipsometry
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- MRS Online Proceedings Library Archive / Volume 258 / 1992
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- 21 February 2011, 3
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- 1992
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Real Time Ellipsometry Study of the Interfaces Formation of Microcrystalline Silicon
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- MRS Online Proceedings Library Archive / Volume 237 / 1991
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- 21 February 2011, 625
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- 1991
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Plasma Surface Interaction During the Growth of Semiconductor Thin Films Studied byin Situ Infrared Ellipsometry
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- MRS Online Proceedings Library Archive / Volume 237 / 1991
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- 21 February 2011, 631
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- 1991
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Infrared Ellipsometry Study of Oriented Langmuir-Blodgett Monolayers
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- MRS Online Proceedings Library Archive / Volume 77 / 1986
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- 26 February 2011, 721
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- 1986
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Ion Bombarment Effect on the Growth of Microcrystalline Germanium
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- MRS Online Proceedings Library Archive / Volume 75 / 1986
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- 28 February 2011, 341
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- 1986
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In-Situ Ellipsometry Study of Amorphous Silicon Interfaces
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- MRS Online Proceedings Library Archive / Volume 77 / 1986
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- 26 February 2011, 381
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- 1986
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Influence of Ion Bombardment on the Nucleation and Growth of Plasna Deposited Amorphous Silicon
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- MRS Online Proceedings Library Archive / Volume 75 / 1986
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- 28 February 2011, 333
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- 1986
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Ion Bombardment Effect on the Properties of a-Si:H
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- MRS Online Proceedings Library Archive / Volume 38 / 1984
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- 21 February 2011, 417
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- 1984
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