Superlattice superconductors exhibit behavior different from other “homogeneous” superconductors because of their layered structures. Sputtering has proved to be an excellent technique for producing such multilayered systems. Also, systems naturally having layered structures, such as the new high-Tc materials, can be fabricated by sputtering. Here we describe the preparation of superconducting superlattices by dc triode sputtering and techniques useful for characterizing them. In particular, we discuss Mo/Ta superconducting superlattices and high Tc thin films of YBa2Cu3O7-x.