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Computational Study on Polymer Filling Process in Nanoimprint Lithography for Bi-Layered Resist
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1499 / 2013
- Published online by Cambridge University Press:
- 20 March 2013, mrsf12-1499-n05-62
- Print publication:
- 2013
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- Article
- Export citation