Directionally solidified Nb-xMo-22Ti-18Si (x = 10, 20 and 30 mol%) and Nb-10Mo-yW-10Ti-18Si (y = 0, 5, 10 and 15 mol%) alloys were prepared. All of the alloys consisted of Nb solid solution and (Nb, Mo, (W,) Ti)5Si3 silicide. In compression tests performed on the Nb-xMo-22Ti-18Si alloys, a sample with x = 10 had the highest maximum stress at 1670 K, but it showed a sharp stress drop after reaching the maximum stress. Samples with x = 20 and 30 showed lower yield and lower maximum stress than that with x = 10, and they showed a small stress drop and an almost constant flow stress of 330 and 400 MPa, respectively. The sample with x = 20 showed a minimum creep rate (ε
) of 9.6 × 10-7 s-1 at 1670 K at a stress of 200 MPa. The yield stress of the Nb-10Mo-yW-10Ti-18Si alloys increased with increasing W content, although the stress decreased gradually after reaching the maximum stress and showed no steady state deformation. The ε
of the sample with y = 15 was 1.4 × 10-7 s-1 at 1670 K at a stress of 200 MPa, which was much slower than that of Nb-20Mo-22Ti-18Si.