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2 results

  • Site controlled nucleation of ferroelectric crystals: a step towards lithography modulated self-assembly

  • P. Muralt, S. Bühlmann, S. Von Allmen
  • Journal:
    MRS Online Proceedings Library Archive / Volume 784 / 2003
    Published online by Cambridge University Press:
    01 February 2011, C1.6.
    Print publication:
    2003

  • An additive technique for the growth of PZT crystallites in the sub-200 nm range on predefined sites is presented. The method is based on nucleation promotion by TiO2 seeds. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served as substrate. TiO2 seed sites have been defined by an e-beam lithographic process. The initial Pb flux determines whether (100) or (111) crystallites are obtained. Best results have been obtained with PZT(100) yielding one square grain per site with a narrow size distribution (120 to 150 nm). In this case, the seed collected additional PbO adatoms reaching the seed by diffusion. The sidewalls consist mostly of {110} facets. A model in the frame of classical nucleation theory describes well experimental observations. The piezoelectric response and the ferroelectric switching of the structures have been verified.