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Effect of Ar annealing temperature on SiO2/SiC:SiO2 densification change causing leakage current reduction
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- Journal:
- The European Physical Journal - Applied Physics / Volume 62 / Issue 2 / May 2013
- Published online by Cambridge University Press:
- 30 April 2013, 20301
- Print publication:
- May 2013
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- Article
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