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Channel Strain Analysis in Damascene-gate pMOSFETs on Si (100) and (110) Substrate by Conventional and Cross-sectional Raman Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1194 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1194-A04-03
- Print publication:
- 2009
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- Article
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