2 results
Growth of Beta Silicon Carbide Film on Si by Hot-Filament CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 339 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 747
- Print publication:
- 1994
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Transmission Electron Microscopy Observation of Constrained Crystallization in a-Si:H/a-SiNx:H Multilayer Film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 358 / 1994
- Published online by Cambridge University Press:
- 28 February 2011, 839
- Print publication:
- 1994
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- Article
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