2 results
Changes of UV Optical Properties of Plasma Damaged Low-k Dielectrics for Sidewall Damage Scatterometry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1079 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1079-N07-04
- Print publication:
- 2008
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- Article
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Synthesis of New Chiral Disubstituted Binaphthol Derivatives and their use as the Chiral Dopants
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- Journal:
- MRS Online Proceedings Library Archive / Volume 425 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 55
- Print publication:
- 1996
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- Article
- Export citation