The fluoroisopropoxide ligand (HFIP) has allowed the synthesis of
mixed-metal homoleptic Ba2Y and CuBa alkoxides. However, although
these species are all volatile, their poor thermal stability precludes their
use as CVD precursors. Their properties have thus been optimized by
introduction of 2,2,6,6-tetramethylheptane-3,5-dione (thdH) in the metal
coordination sphere. Compounds such as
Y2Ba(μ-HFIP)4(thd)4, the first volatile
Y-Ba species reported so far, as well as
BaCu2(HFIP)4(thd)2 and
YCu(HFIP)2(thd)3 have been obtained. These
heterometallic ϐdiketonatoalkoxides have been characterized by a variety of
techniques including X-ray diffraction, mass spectrometry, vapor pressure
measurements and thermogravimetric analysis. Preliminary data on thermal
decomposition experiments are given.