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Characterization and Annealing of Sputtered AlN Films for Piezoelectric Resonators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 447
- Print publication:
- 1994
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The Application of Solid Phase Epitaxy for the Incorporation of Substitutional Carbon in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 321 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 473
- Print publication:
- 1993
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- Article
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