2 results
Deposition Mechanism of Oxide Thin Films Manufactured by a Focused Energetic Beam Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 749 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, W17.8
- Print publication:
- 2002
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- Article
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Ion Beam Induced Chemical Vapor Deposition of Dielectric Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 624 / 2000
- Published online by Cambridge University Press:
- 10 February 2011, 163
- Print publication:
- 2000
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- Article
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