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Backside Analysis of Ultra-Thin Film Stacks in Microelectronics Technology Using X-ray Photoelectron Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1184 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1184-HH08-04
- Print publication:
- 2009
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- Article
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