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Activation Uniformity Dependence of Undoped Semi-Insulating GaAs on Post-Implant Annealing Conditions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 144 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 373
- Print publication:
- 1988
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Rapid Isothermal Annealing of Si Implanted Semi-Insulating GaAs by Means of High Frequency Induction Heating.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 13 / 1982
- Published online by Cambridge University Press:
- 15 February 2011, 641
- Print publication:
- 1982
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Multiply Scanned Electron Beam Annealing of Si Implanted GaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 4 / 1981
- Published online by Cambridge University Press:
- 15 February 2011, 695
- Print publication:
- 1981
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