In-situ grown CuO and ZnO nanowire (NW) arrays were evaluated for their gas
sensing performance. The metal structures were fabricated by standard e-beam
lithography, thermal evaporation and lift-off process onto a silicon substrate
with gold electrodes. After integration onto a test structure with resistive
heater and thermocouple for temperature control, the samples were thermally
oxidized at 400°C. During thermal oxidation, nanowires were grown
between the oxidized metal structures. The gas sensing performance of the NW
array was tested for carbon monoxide, - and a hydrocarbon-mixture (acetylene,
ethane, ethene, and propene) at three relative humidity levels.