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Unified gate capacitance model of polysilicon thin-film transistors for circuit applications

Published online by Cambridge University Press:  24 June 2008

W. Deng*
Affiliation:
Institute of Microelectronics, South China University of Technology, Guangzhou 510640, P.R. China
X. Zheng
Affiliation:
Institute of Microelectronics, South China University of Technology, Guangzhou 510640, P.R. China
R. Chen
Affiliation:
Institute of Microelectronics, South China University of Technology, Guangzhou 510640, P.R. China
W. Wu
Affiliation:
Institute of Microelectronics, South China University of Technology, Guangzhou 510640, P.R. China
Z. An
Affiliation:
Institute of Microelectronics, South China University of Technology, Guangzhou 510640, P.R. China
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Abstract

The characteristics of the gate capacitance at polysilicon thin-film transistors (poly-Si TFTs) based on terms of surface potential have been described and modeled in this paper. An explicit approximate relation for surface potential as a function of terminal voltages is developed. The theory is based on an assumed exponential distribution of trap states in the energy gap. Moreover, the model has been found to give an accurate description of the unique features of poly-Si TFTs, such as rapid increase of Cgs in leakage region and Cgd in kink region. The good agreement between simulated model results and experimental data confirms the accuracy and efficiency of this model.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2008

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References

Fortunato, G., Migliorato, P., J. Appl. Phys. 68, 2463 (1990) CrossRef
Siddiqui, M.J., Qureshi, S., Microelectron. J. 32, 235 (2001) CrossRef
Bindra, S., Haldar, S., Gupta, R.S., Solid-State Electron. 48, 675 (2004) CrossRef
Chen, S.S., Shone, F.C., Kuo, J.B., J. Appl. Phys. 77, 1776 (1995) CrossRef
R.A. Martin, M. Hack, J.G. Shaw, M. Shur, in Proceedings of the IEEE Electron Devices Meeting (1989), p. 361
C.C. Li, H. Ikeda, T. Inoue, P.K. Ko, in Proceedings of the IEEE Electron Devices Meeting (1993), p. 497
Werner, J., Peisl, M., Phys. Rev. B 31, 6881 (1985) CrossRef
Fortunato, G., Migliorato, P., Appl. Phys. Lett. 49, 1025 (1986) CrossRef
Fortunato, G., Meakin, D.B., Migliorato, P., Jpn J. Appl. Phys. 27, 2124 (1988) CrossRef
Jacunski, M.D., Shur, M.S., Owusu, A.A., Ytterdal, T., Hack, M., Iñiguez, B., IEEE Trans. Electron Devices 46, 1146 (1999) CrossRef
Deng, W., Zheng, X., Chen, R., Liu, Y., Solid-State Electron. 52, 695 (2008) CrossRef
Chen, R., Zheng, X., Deng, W., Wu, Z., Solid-State Electron. 51, 975 (2007) CrossRef
Barry, D.A., Parlange, J.Y., Li, L., Prommer, H., Cunningham, C.J., Stagnitti, F., Math. Comput. Simul. 53, 95 (2000) CrossRef
Chen, S.S., Kuo, J.B., IEEE Trans. Electron Devices 41, 1169 (1994) CrossRef