Skip to main content Accessibility help
×
Home

Structural and morphological studies of GaN thin films grown on different oriented LiNbO3 substrates by MOVPE

  • T. Moudakir (a1), G. Orsal (a1), N. Maloufi (a2), A. A. Sirenko (a3), S. Gautier (a1), M. Bouchaour (a1), S. Ould Saad (a1), J. P. Salvestrini (a1) and A. Ougazzaden (a4)...

Abstract

GaN epilayers were grown by metal-organic vapor phase epitaxy (MOVPE) on z- and x-cut lithium niobate substrates. Ex-situ characterizations of the epilayers by means of scanning electron microscope, atomic force microscope, X-ray diffraction and micro-Raman scattering measurements have revealed same growth features on both substrates. The observation of the morphology shows homogeneous and relatively smooth surface. The shape and density of GaN islands as well as the observed columnar growth mode are not dependent of the orientation of the LN substrates. The X-ray diffraction analysis of 450 nm thick GaN layers grown at 730 °C on z- and x-cuts showed that both GaN layers reveal the same crystallographic orientation, i.e. c-axis orientation normal to the substrate plane and in-plane orientation that coincides with the primary axis of LN substrates. The Raman scattering measurements confirm the growth of an oriented epitaxial GaN layer on LN substrate. Moreover, the deposited layer exhibit a quite good homogeneity, since the Raman spectra recorded for different positions in the layer do not reveal any significant variations in their relative intensities and frequency shifts.

Copyright

Corresponding author

References

Hide All
[1] Lee, K.-K., Namkoong, G., Madison, S.M., Ralph, S.E., Doolittle, W.A., Losurdo, M., Bruno, G., Cho, H.K., Mater. Sci. Eng. B 140, 203 (2007)
[2] Doolittle, W.A., Namkoong, G., Carver, A.G., Brown, A.S., Solid-States Electron. 47, 2143 (2003)
[3] Hui, R., Wan, Y., Li, J., Jin, S., Lin, J., Jiang, H., IEEE J. Quant. Electron. 41, 100 (2005)
[4] W.A. Doolittle, G. Namkoong, A. Carver, W. Henderson, D. Jundt, A.S. Brown, Proceedings of Material Research Society Fall Meeting, Vol. 743 (2002), p. L1.4
[5] Namkoong, G., Lee, K.-K., Madison, S.M., Henderson, W., Ralph, S.E., Doolittle, W.A., Appl. Phys. Lett. 87, 171107 (2005)
[6] Y. Tsuchiya, A. Kobayashi, J. Ohta, H. Fujioka, M. Oshima, Phys. Stat. Sol. (a) 202, R 145 (2005)
[7] Langer, R., Simon, J., Ortiz, V., Pelekanos, N.T., Barski, A., Andre, R., Godlewski, M., Appl. Phys. Lett. 74, 3827 (1999)
[8] Lefebvre, P., Allegre, J., Gil, B., Methieu, H., Grandjean, N., Leroux, M., Massics, J., Bigenwald, P., Phys. Rev. B 59, 15363 (1999)
[9] Lefebvre, P., Morel, A., Gallart, M., Taliercio, T., Allegre, J., Gil, B., Mathieu, H., Damilano, B., Grandjean, N., Massics, J., Appl. Phys. Lett. 78, 1252 (2001)
[10] Takeuchi, T., Wetzel, C., Yamaguchi, S., Sakai, H., Amano, H., Akasaki, I., Kaneko, Y., Nagagawa, S., Yamaoka, Y., Yamada, Y., Appl. Phys. Lett. 73, 1691 (1998)
[11] Sartel, C., Gautier, S., Ould Saad Hamady, S., Maloufi, N., Martin, J., Sirenko, A., Ougazzaden, A., J. Superlatt. Microstruct. 40, 476 (2006)
[12] Gautier, S., Sartel, C., Ould-Saad, S., Martin, J., Sirenko, A., Ougazzaden, A., J. Cryst. Growth 298, 428 (2007)
[13] Yu.S. Kuz'minov, Lithium niobate crystals (Cambridge International Science Publishing, 1st published June 1999)
[14] Ougazzaden, A., Moudakir, T., Aggerstam, T., Orsal, G., Salvestrini, J.P., Gautier, S., Sirenko, A.A., Phys. Stat. Sol. (c) 5, 1565 (2008)
[15] Davydov, V.Yu., Averkiev, N.S., Goncharuk, I.N., Nelson, D.K., I.P. Nikitina, A.S. Polkovnikov, A.N. Smirnov, M.A. Jacobson, O.K. Semchinova, J. Appl. Phys. 82, 5097 (1997)
[16] Kisielowski, C., Krüger, J., Ruvinov, S., Suski, T., Ager III, J.W., Jones, E., Liliental-Weber, Z., Rubin, M., Weber, E.R., Bremser, M.D., Davis, R.F., Phys. Rev. B 54, 17745 (1996)

Keywords

Related content

Powered by UNSILO

Structural and morphological studies of GaN thin films grown on different oriented LiNbO3 substrates by MOVPE

  • T. Moudakir (a1), G. Orsal (a1), N. Maloufi (a2), A. A. Sirenko (a3), S. Gautier (a1), M. Bouchaour (a1), S. Ould Saad (a1), J. P. Salvestrini (a1) and A. Ougazzaden (a4)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.